Direct hot embossing of microelements by means of photostructurable polyimide
نویسندگان
چکیده
منابع مشابه
Characterisation of PMMA microfluidic channels and devices fabricated by hot embossing and sealed by direct bonding
In this study we fabricated a silicon-based stamp with various microchannel arrays, and demonstrated successful replication of the stamp microstructure on poly methyl methacrylate (PMMA) substrates. We used maskless UV lithography for the production of the micro-structured stamp. Thermal imprint lithography was used to fabricate microfeatured fluidic platforms on PMMA substrates, as well as to ...
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This research focuses on the manufacturing of 1 by 4 multimode polymer splitter. MEMS fabricating process was first adopted for the fabrication of four inches silicon mold insert and then the micro hot embossing technique was applied to the optical class PMMA material for splitters. The BeamPROPTM simulation software was utilized for the design of optimal silicon mold insert. In the analysis of...
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In MEMS technology, most of the devices are fabricated on glass or silicon substrate. However, this research presents a novel manufacture method that is derived from conventional hot embossing technology to fabricate the electrostatic switches on polymer material. The procedures of fabrication involve the metal deposition, photolithography, electroplating, hot embossing and hot embed techniques...
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ژورنال
عنوان ژورنال: Journal of Micro/Nanolithography, MEMS, and MOEMS
سال: 2016
ISSN: 1932-5150
DOI: 10.1117/1.jmm.15.3.034506